抄録
With the increasing demand for quick and precise pressure control, measuring the higher response signal (i.e. flux) is required. Formally, in a pressure servo control system, first, pressure in a tank is measured by a pressure sensor, and then, estimation of the flux (as seen in D-PI control systems) or predictive control have been conducted. But if the flux itself can be measured, it contributes to raise the controllability. In this paper, a pressure differentiator applying the principle of isothermal chamber is proposed. Firstly, the principle and the design method of the sensor are discussed. Then, the simulation and experiment are conducted and the results show the effectiveness of the proposed apparatus, and its possibility to future applications.
