Some pneumatic systems require to measure the differentiated value of pressure with high resolution and high response. In former research, a pressure differentiator which is constituted of an isothermal chamber, a laminar flow element with narrow pipes, and a diaphragm type differential pressure gauge is proposed. In this paper, in order to improve the dynamic characteristics of the pressure differentiator and make the sensor compact, slit type micro channels are fabricated with Micro Machining technology. Firstly, the principle and the design method of the sensor are discussed. Then, machining processes are explained. Finally, the results of performance tests are shown. The results indicate the high performance of the developed sensor.
