Abstract
In this paper, we proposed and developed an unsteady flow controller for gases which could generate the unsteady flow continuously. This controller consists of an isothermal chamber and two spool type servo valves. The principle of the controller was shown. Then, the specification and the control method were explained. We confirmed that the flow controller could generate continuously the unsteady flow over 30 minutes. Moreover, the controller could control the oscillatory flow up to 30[Hz] within uncertainty of 5[%]. Therefore, this flow controller is effective for the dynamic characteristics measurement of gaseous flow meters.
