単結晶シリコン箔およびガラス箔の
レーザフォーミング

抄録

Borosilicate glass and single crystalline silicon foils were bent by laser forming. Because these materials are brittle at room temperature, it is necessary to form them plastically at a high temperature. In this study, it was easy to heat foils by laser irradiation. In the case of forming borosilicate glass foils, a resistant heater was used accessorily to heat the foils. A 20 W Q-switch pulsed YVO4 laser was employed at a frequency of 200 kHz. Bending angles were investigated by changing laser power, scanning velocity, and defocus length. From the experimental results, in the case of forming borosilicate glass foils, the bending angle became larger when the laser power was 12 W, scanning velocity was smaller and defocus length was 8 mm. In the case of forming single crystalline silicon foils, the bending angle reached the maximum when the laser power was 13 W, scanning velocity was 15 mm/s, and defocus length was 5 mm. Multiple laser scanning at a constant scanning pitch was also carried out for borosilicate glass foils, and the foils were bent into partially cylindrical shape.