1988 Volume 25 Issue 4 Pages 209-215
β-SiC ultra-fine particles were prepared by feeding reactant gases of CH4 and SiH4 into a newly developed R. F. thermal plasma furnace.
Amorphous β-SiC particles were deposited on the inner wall of the plasma torch, while crystalline β-SiC particles were found downstream of the tail flame of the torch.
By using TEM micrographs, the configurations of the crystalline β-SiC particles were found to be chain-like agglomerates which consisted of fine primary particles approximately 200Å-500Å in size.
The bonding states between the primary particles were presumed to be sintering from the magnified TEM micrographs.
Size distributions for agglomerate particles were determined by conventional particle size analyzers, and these results were compared with that obtained from the TEM micrographs.
A dynamic shape factor was introduced in order to account for the behavior of the agglomerates in the various media.
