1994 Volume 31 Issue 6 Pages 409-415
Air filters (ULPA, HEPA) are used to remove fine particles from the air in clean rooms, but recently air contamination with minute quantities of gases or mist, etc. are a threat to the safety of workers and have become a problem. The conventional air filteration method is not effective to solve this problem.
In order to overcome this difficulty, we have developed a new air cleaning system which removes fine particles and gases simultaneously by heterogeneous nucleation and also has an air conditioning function. In this study, we have analyzed the nuclear condensation phenomena theoretically, verified the performance of test equipment fabricated by us, and confirmed that the system removes both fine particles and gases at a high efficiency of more than 99.8%.
