Study on Manipulation and Welding Method of Fine Particles Using Microprobe

Abstract

A new particle manipulator composed of a tungsten probe, a worktable with a stage system and two optical microscopes is fabricated. The apparatus is featured by an equipment of power source, which applies voltage between the probe and a substrate on the worktable. Using gold particles of 40-80μm, the performance of the apparatus is examined. The experiments show that manipulation and welding can be carried out as follows. The probe is positioned for the tip to touch an objective particle on the substrate. The particle is adhered at the tip of the probe and is picked up when 20-50V is applied between the probe and the substrate. The particle is carried to a predetermined point on the substrate and the particle on probe is put in contact with the substrate surafce. By applying 4kV or more, electric sparks generated between the probe and the substrate, and the particle is welded to the substrate. The apparatus has an advantage that both manipulation and welding can be carried out using the same tool saving operation time and improving the accuracy of products.