Abstract
Microfabrication processes for particle arrangement is very important in developing micrometerscaled materials or devices with a high performance. It is especially well known that a three-dimensional ordering of monodisperse microspheres gives optical characteristics for future photonic application such as optical waveguide, laser oscillation, and sensor. Microdots and micropatterns consisting of three-dimensionally ordered monodisperse microspheres of polymer or ceramics were fabricated by using electrophoretic deposition process with a microelectrode or a patterned electrode.