Abstract of annual meeting of the Surface Science of Japan
26th annual meeting of the Surface Science Society of Japan
Session ID : P44
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November6
Study of SiC MIS structure using AlSiO thin film
*Hirofumi KurimotoNaoyoshi KomatsuChiharu KimuraHidemitsu AokiTakashi Sugino
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract
[in Japanese]
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© 2006 The Surface Science Society of Japan
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