Abstract
In the fabrication of organic semiconductor thin films by the vacuum evaporation, thin film structures are greatly influenced by elementary processes in the initial stage of the thin film growth, such as adsorption, desorption and diffusion. In this work, we performed an in-situ measurement during pentacene thin film growth using a quartz crystal microbalance, which is non-destructive and highly accurate measurement of adsorption amount of molecules. By analyzing results, the mean stay time of pentacene molecules on a substrate, which is an important physical parameter in thin film growth, was successfully estimated quantitatively.
