Abstract of annual meeting of the Surface Science of Japan
[volume title in Japanese]
Session ID : 2Dp11
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Crystal orientation of tungsten thin films prepared by magnetron sputtering
*Yasuhito GotohHirofumi FujiwaraShotaro Yano
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Abstract
Role of the neutral argon beam reflected at the target surface on the crystal orientation of the tungsten thin films prepared by magnetron sputter deposition has been investigated. At the peripheral of the subtrate holder, thin films were prepared on the inclined substrates. The crystal orientation of these films agreed with that predicted by our previous model.
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© 2018 The Surface Science Society of Japan
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