Development of NEG Pump Using Oxygen-Free Pd/Ti

Abstract

We developed a non-evaporable getter (NEG) pump in which oxygen free Pd/Ti was deposited on the inner surface of a vacuum vessel consisting of ICF 203 flange, pipe, bottom plate, nine partition plates and support plate. The present NEG pump can be activated by baking at 150 °C for 12 h. The initial pumping speed was about 670 L/s for H₂ and about 880 L/s for CO. In addition, it was confirmed that the pumping speed did not decrease even if air vent and activation were repeated nine times.