The Joint Annual Symposium of the Vacuum Society of Japan and the Surface Science Society of Japan (SVSS'10)
30th Annual Symposium of the Surface Science Society of Japan / 51th Annual Symposium of the Vacuum Society of Japan
The Vacuum Society of Japan / The Surface Science Society of Japan
Session ID : 4P-024
Conference information
Host:
the Vacuum Society of Japan and the Surface Science Society of Japan
Preparation of TiO2 Thin Film Photocatalyst by Radical Assisted Sputtering and Development of Technique for Modulating Film Structure based on Gas-phase Diagnosis