Abstract of annual meeting of the Surface Science of Japan
The Joint Annual Symposium of the Vacuum Society of Japan and the Surface Science Society of Japan (SVSS'10)
30th Annual Symposium of the Surface Science Society of Japan / 51th Annual Symposium of the Vacuum Society of Japan
The Vacuum Society of Japan / The Surface Science Society of Japan
Session ID : 4P-040
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Host: the Vacuum Society of Japan and the Surface Science Society of Japan

November4
Copper filling to through holes by high vacuum planar magnetron sputtering and supercritical CO2 fluid
Masatoshi Itoh, *Tomonori Numakawa, Yasunori Oono, Masato Terasaki, Yuuki Maeda, Yosio Uhara, Katsuto Otake, Shigeru Saito
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[in Japanese]

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© 2010 The Surface Science Society of Japan/the Vacuum Society of Japan
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