The Joint Annual Symposium of the Vacuum Society of Japan and the Surface Science Society of Japan (SVSS'10)
30th Annual Symposium of the Surface Science Society of Japan / 51th Annual Symposium of the Vacuum Society of Japan
The Vacuum Society of Japan / The Surface Science Society of Japan
Session ID : 4P-043
Conference information
Host:
the Vacuum Society of Japan and the Surface Science Society of Japan
Experimental Fabrication of Tension Control System for Roll-to-roll Sputtering System Using Highly Efficient Micro-sized Force Sensor