Abstract of annual meeting of the Surface Science of Japan
The Joint Annual Symposium of the Vacuum Society of Japan and the Surface Science Society of Japan (SVSS'10)
30th Annual Symposium of the Surface Science Society of Japan / 51th Annual Symposium of the Vacuum Society of Japan
The Vacuum Society of Japan / The Surface Science Society of Japan
Session ID : 5P-020V
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Host: the Vacuum Society of Japan and the Surface Science Society of Japan

November5
Deposition of High quality ITOthin-films with New-MHV Sputtering System
*MASATOMO YASUDA, MASAMI SHIMIZU, SOUITI OGAWA, MASATOSI KONDOU
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[in Japanese]

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© 2010 The Surface Science Society of Japan/the Vacuum Society of Japan
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