The Joint Annual Symposium of the Vacuum Society of Japan and the Surface Science Society of Japan (SVSS'10)
30th Annual Symposium of the Surface Science Society of Japan / 51th Annual Symposium of the Vacuum Society of Japan
The Vacuum Society of Japan / The Surface Science Society of Japan
Session ID : 5P-055S
Conference information
Host:
the Vacuum Society of Japan and the Surface Science Society of Japan
Fabrication of Diamond Nano-dot Patterns by Room-temperature Curing Nanoimprint Lithography using Hard Carbon Molds