Abstract of annual meeting of the Surface Science of Japan
32st annual meeting of the Surface Science Society of Japan
Session ID : 21P37
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Host: The Surface Science Society of Japan

November21
Infrared spectroscopic study on reactions during hydrogen plasma irradiation onto Si
Yoshiki Takami, Yuya Takaki, *Masanori Shinohara, Yoshinobu Matsuda, Hiroshi Fujiyama
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[in Japanese]
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© 2012 The Surface Science Society of Japan
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