Abstract
AD (aerosol deposition) method is a newly developed spray coating of powder materials. High density consolidation of ceramic powder can be obtained at room temperature without sintering at high temperature. In a rapid and low cost production system (named as on-demand production system), a high performance optical micro scanner was fabricated using AD method for formation of piezoelectric thick layer, ink-jet printing for metal wiring and mechanical punching for structuring of micro scanner. The improvement of device performance, the reduction of energy-consumption and process steps will be simultaneously achieved, leading to reduction of production cost of the functional devices remarkably.
