デカシクレンを原料とするCVD薄膜の調製とその電気伝導性

抄録

Carbon thin films were prepared from Decacyclene on quartz substrates with Chemical Vapor Deposition (CVD) process at 900°C under various conditions. The thickness and the electrical conductivity of these carbon thin films were measured by analytical instrument. As a result, it was found that the thickness of the obtained carbon thin films was controlled in the range of 0.1-1.5 μm by changing raw material temperature, reaction time, and the flow rate of carrier gas, and the electrical conductivity tended to increase with decreasing the thickness.