Abstract
Diffusion bonding at low temperature is a necessary process for the manufacturing of metal MEMS (Micro-Electronic-Mechanical Systems) such as, in the case of metal micro-pump that requires a high proof strength. Metals with severe plastic deformation having high mobility grain boundaries are known to bond at low temperatures. We then simultaneously carried out recrystallization and solid phase diffusion bonding of the metals. In this paper, we have confirmed a reduction in the diffusion bonding temperature in severe plastic-deformed SUS304 and SUS316L as compared to the case of heat treated solutions. Especially the bonding temperature was decreased considerably in SUS304 having strain-induced martensite.
