Journal of Ternary and Multinary Compounds
Online ISSN : 2758-2302
2020
Conference information

Deposition of Cu2SnS3 Thin Films on Mo Coated Substrates by Fine Channel Mist CVD Method
Takuya TomonoHumitaka YoshihisaKazuya OkamuraKunihiko Tanaka
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CONFERENCE PROCEEDINGS FREE ACCESS

Pages 35-39

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Abstract

To prevent exfoliation of Cu-Sn precursor, which deposited by fine channel mist CVD, from Mo coated substrate, annealed Mo coated substrate in N2 atmosphere was used. The prevent of exfoliation was considered to be due to MoO2 thin film grown on Mo by annealing in N2 atmosphere which decreases difference of coefficient of thermal expansion between Cu-Sn precursor and the substrate. After sulfurization, the Cu-Sn precursors showed X-ray diffraction peaks attributed to (133), (333) and (200) peaks of monoclinic Cu2SnS3.

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© 2021 Professional Group of Multinary Compounds and Solar Cells
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