Grazing-incidence Small-angle Scattering as a Tool for Thin Film Microstructure and Interface Analysis

Hiroshi Okuda; Shojiro Ochiai; M. Ohtaka; Tetsu Ichitubo; Ei-ichiro Matsubara,; Noritaka Usami; Kazuo Nakajima; Sono Sasaki; Osami Sakata

doi:10.14723/tmrsj.32.275

Hiroshi Okuda, Shojiro Ochiai, M. Ohtaka, Tetsu Ichitubo, Ei-ichiro Matsubara,, Noritaka Usami, Kazuo Nakajima, Sono Sasaki, Osami Sakata

著者情報

キーワード: GISAXS, semiconductor nanodots, Si-Ge, In-situ GISAXS, Fe-Pd-Cu alloys

ジャーナルフリー

2007 年 32 巻 1 号 p. 275-280

DOI https://doi.org/10.14723/tmrsj.32.275

詳細

抄録

Several applications of grazing-incidence small-angle scattering (GISAXS) on the microstructural evolution at and near the surface as well as static evaluations of metallic and semiconducting nanodots are presented. The advantages of GISAXS over other methods, including transmission SAXS and microscopy are shown. By using GISAXS, static structure of even single layer of nanodots can be evaluated, including their interface abruptness.

責任著者(Corresponding author)

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