抄録
Pyrochlore-type ferroelectric La2Ti2O7 thin films were prepared on SrTiO3 (100) substrate by metalorganic deposition. The high-quality La2Ti2O7 thin film was obtained using pre-crystallization, which keeps at 660°C for 5 min before final crystallization from 700 to 1100°C. The La2Ti2O7 thin film crystallized at 900°C consisted of small surface roughness of 3 nm and small grain size with a diameter of 100 nm against the film thickness of 400 nm. The valence band measured by soft-X-ray emission spectroscopy, which reflects the electronic structure in the bulk state, accords with band calculation of La2Ti2O7. The resistivity was approximately 109 ohm. These findings are considered to be due to the activation of nuclear creation for growth of thin film with pre-crystallization.
