Transactions of the Materials Research Society of Japan
Online ISSN : 2188-1650
Print ISSN : 1382-3469
ISSN-L : 1382-3469
Synthesis of Carbon Nanofibers Using Carbon Monoxide DC Plasma at Room Temperature
Shinsuke MoriMasanobu FukuyaMasaaki Suzuki
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2007 年 32 巻 2 号 p. 513-516

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A low temperature synthesis of carbon nanofibers was demonstrated by a plasma-enhanced chemical vapor deposition (PECVD). A low temperature CO/Ar DC plasma was used in this study. Carbon films deposited on glass substrate during PECVD were characterized by scanning electron microscopy and Raman spectroscopy. The effect of discharge current and substrate location on the CNFs formation has been investigated. The results show that vertically aligned carbon nanofibers can be synthesized at even room temperature with optimum discharge conditions when the substrate is placed on the cathode.
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© 2007 The Materials Research Society of Japan
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