抄録
A low temperature synthesis of carbon nanofibers was demonstrated by a plasma-enhanced chemical vapor deposition (PECVD). A low temperature CO/Ar DC plasma was used in this study. Carbon films deposited on glass substrate during PECVD were characterized by scanning electron microscopy and Raman spectroscopy. The effect of discharge current and substrate location on the CNFs formation has been investigated. The results show that vertically aligned carbon nanofibers can be synthesized at even room temperature with optimum discharge conditions when the substrate is placed on the cathode.
