Transactions of the Materials Research Society of Japan
Online ISSN : 2188-1650
Print ISSN : 1382-3469
ISSN-L : 1382-3469
Tribological Characteristics of Ultra-thin DLC Films Prepared by Filtered Cathodic Vacuum Arc
Nobuto YasuiHiroshi InabaNobuyoshi KasaharaHiroya MurakamiNaoto Ohtake
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2007 年 32 巻 2 号 p. 523-526

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Recently, to meet the demands of emerging industries, such as magnetic storage devices and micro electro mechanical systems (MEMS), diamond-like carbon (DLC) coatings have been required to be ultra-thin and sufficiently durable. The present study employed frictional force microscopy (FFM) to measure the coefficient of friction (COF) of ultra-thin DLC films, and thus, characterize their mechanical durability. FFM revealed that the COF of DLC films prepared by filtered cathodic vacuum arc (FCVA) increased with decreasing thickness. To explain the above tribological behavior, several mechanisms were discussed. The indications are that an increase in contact area plays an important role in the increase of COF of ultra-thin DLC films.
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© 2007 The Materials Research Society of Japan
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