Epitaxial Growth and Ferroelectric Properties of PbTiO3 Thin Films on Coherently Grown Pt Bottom Electrodes

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We investigated epitaxial growth of PbTiO3 thin films on coherent and incoherent Pt thin films on SrTiO3(100) by metal organic chemical vapor deposition and their ferroelectric properties. PbTiO3 films were grown on both Pt films in the Volmer-Weber mode. The coalescence of neighboring islands observed at the earlier growth stage on coherent Pt films than on incoherent Pt films due to the higher crystalline orientation and smoother surface. Therefore, the minimum thickness above which continuous PbTiO3 films were formed on coherent Pt films, 50nm, was smaller than 100nm on incoherent Pt films. 50nm-thick PbTiO3 films on coherent Pt films showed D-E hysteresis loops with a remanent polarization of 64.0C/cm2 and a coercive field of 275kV/cm.