2008 年 33 巻 1 号 p. 69-72
PbTiO3 (PTO) ferroelectric nanocrystals were deposited on atomically flat α-Al2O3 (0001) substrates by RF magnetron sputtering. The atomically flat α-Al2O3 (0001) substrates were obtained by annealing the α-Al2O3 (0001) substrate for about 3 hours at 1000-1200°C and the surface with atomic steps and terrace was observed by atomic force microscopy (AFM). In the RF magnetron sputtering method, high energy particles were sputtered on the substrates. Therefore, nucleation of crystals is stimulated at the atomic steps by control particles sputtered with high energy. Their particles were controlled by setting a cover material (α-Al2O3) on the substrates. Judging from the result of observations with XRD, XRF and AFM, the crystallized PTO nanocrystals were triangular in shape, with side length of 100-150nm and height of 20-30nm. In addition, it was confirmed by AFM that, when the cover allowed sputtered particles to approach ascending atomic steps, PTO nanocrystals fell into alignment along the atomic steps. So, it was found that relation between direction of steps and direction in which sputtered particles came flying were very important.
