抄録
In this study, nano-porous mullite nano-powders were prepared to deposit the low-K thin films on the LTCC by the direct material writing. For the first step, prepared nano-porous mullite nano-powders were spin-coated on a Si wafer with Pt electrode to investigate the electrical properties of the resulting nano-porous low K thin films. As a result, nano-porous thin films of mullite with enough high registivity were successfully deposited by the spin-coating using the highly nano-porous mullite nano-powder. The electrical properties of the resulting nano-porous thin films depended on the hybrid structure of the films, showing the possibility for the material direct writing by using the nano-porous mullite nano-powders for the low K thin films on a LTCC.
