抄録
Electrochemical deposition method has some advantages over the conventional methods such as large area deposition at low temperature. ZnO thin films were prepared by this method with various electrolytic current in a range of 4.5 - 122 micro A/cm2 to evaluate the relation of growth rate to the surface morphology. All samples showed 0002 preferred orientation tendencies. Furthermore, it was confirmed that the shape and size of grains depends heavily on the electrolytic current. The ZnO films deposited with electrolytic current of 22 - 71 micro m/cm2 had especially large hexagonal grains with sharp liner edges and flat planes.
