Development of New X-ray CTR Scattering Measurement System Using Johansson Monochromator

Abstract

A new X-ray CTR scattering measurement system was reported that was equipped with a Johansson monocromator to focus X-rays at a sample position. Using the focused X-rays and a two-dimensional detector, X-ray CTR scattering measurement was able to be carried out without moving any component of the measurement system. The results of the X-ray CTR scattering measurement using the new system successfully demonstrated that the CTR scattering profiles were comparable to that measured at PF using synchrotron radiation even when the measurement time was 10 minutes or longer. The results suggested that the new measurement system is useful for quick and in-situ X-ray CTR scattering measurements.