Low Temperature Growth of Carbon Nanomaterials on the Polymer Substrates by Microwave Plasma Technique

Abstract

In this study, multi-walled carbon nanotubes and few-layer graphene sheets have successfully grown on Si and polyimide substrates at relatively low temperature of 230～260°C by the microwave-excited surface wave plasma technique. Graphite-encapsulated Ni nanoparticles have been used as the catalyst for growing CNMs in NH₃/CH₄ plasma. It has been found that bias voltage and nature of the substrate can greatly influence the CNMs structure.