抄録
We report on the effect of nano-sized Ag and Al layer on the electrical and optical properties of the ITO/Ag/ITO (IAI) multilayer films as well as a work function. With increasing the thickness of the Ag and Al layer, we investigated the change of electrical and optical properties of the IAI multilayer in detail. Regardless of thickness of the Ag and Al top layer, the IAI multilayer showed a constant sheet resistance of ～5 Ohm/square and a high transmittance of ～87%. However, the surface morphology and microstructure of the IAI multilayer were affected by the nano-sized Al and Ag cover layer due to different oxidation behavior. The work function of the IAI multilayer with nano-sized Ag cover layer is constant (～4.95 eV) regardless of Ag thickness, while the work function of the IAI multilayer with Al layer decreased from 4.95 eV to 4.75 eV with increasing Al thickness. This indicates that the coating of the nano-sized Al is effective way to decrease the work function of the IAI multilayer films.
