Perpendicular Magnetic Properties of [CoPt/AZO/Ag] Multilayered Films for Magneto-optical Chemical Sensing Applications

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The perpendicular magnetic properties of [CoPt/AZO/Ag] multilayered films were investigated under polar Kerr measurement conditions. The magnetic properties were influenced by AZO layers formed upon the top and bottom surfaces of CoPt magnetic layer. The insertion of AZO intermediate layer into the CoPt/Ag interface improved the perpendicular magnetic properties, and it was attributed to the improvement of the CoPt crystallinity. In contrast, the AZO overcoat layer which was directly formed on the top of the CoPt layer reduced the perpendicular magnetic anisotropy. This magnetic deterioration was suppressed by the oxidation of the CoPt surface. A plasma oxidation process provided good perpendicular magnetic properties with an ideal square out-of-plane Kerr loop.