Quantitative Ion Beam Analysis for Light Elements using In-air and High Depth Resolution Systems

抄録

Ion beam is used for quantitative element analysis. In the Wakasa Wan Energy Research Center (WERC), various types of ion beam analysis; Particle Induced X-ray Emission (PIXE), Rutherford Backscattering Spectrometry (RBS), and Elastic Recoil Detection Analysis (ERDA), have been performed with a 5 MV tandem accelerator. Recently, in-air and time-of-flight systems have been developed in WERC. The in-air measurement is required often for hydrogen storage materials to determine hydrogen quantity. Hydrogen quantities of magnesium-hydride (MgH_x) thin films after production and after hydrogen absorption by magnetron sputtering were measured by the in-air system. The time-of-flight (TOF) ERDA measurement is useful for multi element simultaneous analysis with high depth resolution. The TiO₂ thin film of 10 nm thickness has been measured with the TOF ERDA system.