Regular Section
Sandwich Structure Type RF-MEMS Variable Capacitor with Low Voltage Controllability and Wide Tuning Range
2008 年 E91.B 巻 2 号 p. 572-574
詳細
2008 年 E91.B 巻 2 号 p. 572-574
A sandwich structure type RF-MEMS variable capacitor is proposed, that consists of a movable middle plate, and fixed top and bottom plates having different areas. Simulation results show that the proposed capacitor can operate at a control voltage of less than 3.2V; it achieves a tuning range of 4.8:1 (capacitance: 630-130fF) in the range of 0 to 3.2V and at a frequency of 7.5GHz.
