抄録
We have been developing low power cryogenic readout electronics for space borne large format far-infrared image sensors. As the circuit elements, a fully-depleted-silicon-on-insulator (FD-SOI) CMOS process was adopted because they keep good static performance even at 4.2K where where various anomalous behaviors are seen for other types of CMOS transistors. We have designed and fabricated several test circuits with the FD-SOI CMOS process and confirmed that an operational amplifier successfully works with an open loop gain over 1000 and with a power consumption around 1.3µW as designed, and the basic digital circuits worked well. These results prove that the FD-SOI CMOS process is a promising candidate of the ideal cryogenic readout electronics for far-infrared astronomical focal plane array sensors.
