抄録
To clarify the characteristics of high-speed electrostatic discharge (ESD) events, we use two kinds of discharge electrodes: sphere- and cylinder-shape ones. We measure the energy level of ESD waveforms with charging voltages of 0.25, 0.5, and 1.0kV. We find that the cylindrical electrode yields higher high-speed ESD energies, especially when the charging voltage is high; this indicates that the discharge gap shape is an important factor in ESD events.
