Analysis of Effective Material Properties of Metal Dummy Fills in a CMOS Chip

Takuichi HIRANO; Ning LI; Kenichi OKADA

doi:10.1587/transcom.2016EBT0004

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Analysis of Effective Material Properties of Metal Dummy Fills in a CMOS Chip

Takuichi HIRANO, Ning LI, Kenichi OKADA

著者情報

キーワード: Dummy metal fills, CMOS, effective material property, permittivity, permeability, millimeter-wave

ジャーナル認証あり早期公開

論文ID: 2016EBT0004

DOI https://doi.org/10.1587/transcom.2016EBT0004

この記事には本公開記事があります。

The final version of this article is now available: Vol. E100.B (2017), No. 5 pp. 793-798

詳細

抄録

The equivalent anisotropic material parameters of metal dummy fills in a CMOS chip were extracted through an eigenmode analysis of a unit-cell of a space filled with metal dummies. The validity of the parameters was confirmed by comparing the S-parameters of a parallel-plate waveguide with the metal dummy fills and their effective material properties. The validity of the effective material properties was also confirmed by using them in a simulation of an on-chip dipole antenna.

責任著者(Corresponding author)

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