Ozone generation by nonequilibrium atmospheric pressure discharge plasma using packed particle bed with titanium oxide

Abstract

Ozone is almost exclusively generated by dielectric barrier discharge (DBD). The presence of the dielectric layer between the discharge gap leads to the formation of a large number of micro-discharges of nanosecond duration, and a thermal nonequilibrium plasma condition in atmospheric pressure is formed by this phenomenon. In this study, the reaction field by packed particle bed with titanium oxide was formed in a traditional ozone generator. Titanium oxide can generate active oxygen spices by the photocatalytic reaction (the internal photoelectric effect) using ultraviolet rays emitted from DBD and assist ozone generation by DBD only. As a result, high ozone yield and high ozone concentration have been obtained by using this ozone generation system and using pure oxygen as source gas, especially high ozone yield has been obtained by using low discharge power. These effects of packed bed with titanium oxide on ozone generation characteristics has been clarified by comparison with packed bed by aluminum oxide.