2014 Volume 59 Issue 9 Pages 569-576
Relationship between applied voltage and S/Mo ratio of molybdenum disulfide films prepared by applying various positive voltages to substrates under the sputtering condition of constant argon pressure and radio frequency (RF) power was investigated. The S/Mo ratio analyzed by EPMA increased in the range of 1.96 to 2.25 when the voltage was applied from 0 to 60 V. The S/Mo ratios measured by EPMA and those analyzed by peak separation of XPS were compared. It was confirmed that both S/Mo ratios showed good agreement with each other. Moreover, film properties such as impurity contents, density, internal stresses, crystalline orientation and interplanar spacing, which would relate to tribological performance, were clarified. Especially, Fe elements composing the substrate were detected in the films at the applied voltage of 45 V and 60 V. To confirm the status of Fe elements in the film, XPS analysis was performed. As a result, it was found that Fe elements were distributed throughout the film thickness.
