接触式エアリアル表面粗さ測定の技術動向

―測長原子間力顕微鏡を用いた事例―

抄録

The information obtained by profile measurement with a conventional contact-type surface roughness measuring instrument is information from “lines”, but by using an atomic force microscope (AFM) image, surface roughness information from “planes” can be obtained also. This paper describes the latest technological trends in profile surface roughness measurement by a metrological AFM and areal surface roughness measurement.