FCVA法によるホウ素含有炭素ターゲットを用いたta-C:B膜の成膜および300℃までのトライボロジー特性

抄録

Boron doped tetrahedral amorphous carbon (ta-C:B) coatings were deposited with Filtered Cathodic Vacuum Arc (FCVA) method using boron doped graphite target (B=0, 5 and 10 at. %). The material properties and tribological properties of ta-C:B coatings were obtained at 23~300^oC. The amount of boron contents in ta-C:B coatings are from 0 to 5.1 at. %, and the hardness of coatings ware more than 30 GPa. The friction coefficient of ta-C:B_3.1 at 300^oC is about 0.02 in air. The specific wear rate of ta-C:B coating were lower than normal ta-C coating by 34% and 46% for ta-C:B_3.1 and ta-C:B_5.1, respectively. The sp²/(sp²+ sp³) ratio measured by XPS and O/C ratio measured by AES increased through the friction at 300^oC for ta-C, on the other hand both values did not change for ta-C:B. Friction coefficients of ta-C:B_3.1 were shown as 0.055 at 23^oC and about 0.02 at 100~300^oC. The specific wear rate of ta-C:B_3.1 at 23~300^oC in air was about 2.0 × 10⁻⁶ mm³/Nm. From these results, we confirmed that ta-C:B shows lower friction and higher specific wear resistance at 23~300^oC in air than ta-C.