Soft Magnetic Properties and Microstructures of FeTaNC Films

抄録

Soft magnetic properties and microstructural evolution of FeTaNC films were investigated, and compared with FeTaN and FeTaC films. Effects of substrate species (glass vs. CaTiO_3) on the magnetic properties were also investigated. Co-addition of N and C significantly enhance the grain refinements and soft magnetism compared with N or C addition only. Good soft magnetic characteristics of coercivity of 0.17 Oe, permeability of 4000 (5 MHz). and saturation flux density of 17 kG can be obtained in the FeTaNC in the relatively wide process window. While these values appears to be similar to those of FeTaN on glass substrate, most distinctive difference between FeTaNC and FeTaN (or C) is in the effects of substrate. Whereas FeTaNC films show good magnetic charactcristics for both glass and CaTiO_3 substrates, FeTaN (or C) films shows significant degradation on the CaTiO_3 substrate.