F-2 A Super-Precision Evaluation Method of CTE for Ultra-Low Expansion Glasses Using the LFB Ultrasonic Material Characterization System(Measurement techniques, Imaging, Nondestructive testing)

抄録

We applied the LFB-UMC system to the evaluation of commercial TiO_2-SiO_2 glasses, and demonstrated that this system is extremely useful for characterization of ULE glasses in the EUVL system. We will hereafter improve the measurement accuracy and study the measurement model to establish the striae evaluation method for the TiO_2-SiO_2 glasses.