Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
3Pb3-6 ScAlN multilayer second overtone mode resonator fabricated by Al_2O_3 ingot sputter deposition(Poster Session)
Masashi Suzuki, Takahiko Yanagitani, Hiroyuki Odagawa
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2012 Volume 33 Pages 459-460

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© 2012 Institute for Ultrasonic Elecronics
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