Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
3J3-2 Transversal type BAW filter using polarization-inverted c-axis zigzag ScAlN multilayers
Saneyuki Shibata, Takahiko Yanagitani
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2023 Volume 44 Pages 243-

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