Development and its Applications of Diamond Array Tool using Silicon Mold (4th Report)

Abstract

In this study, we developed a diamond AFM cantilever for micro-to-nano scale machining. The diamond AFM cantilever is composed of single crystal silicon cantilever and a cutting edge with controlled tip shape. The former is fabricated by anisotropic etching of the single crystal silicon, the latter is taken out from diamond array tool. The diamond array tools are fabricated by depositing polycrystalline diamond using CVD on silicon molds which are made by anisotropic wet etching of the single crystal silicon. As a result, the diamond cantilever with pyramidal shape of probe fabricated from (100) single crystal silicon was fabricated.