Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
3P3-2 Analysis of Sezawa mode RSAWs on ScAlN or YbAlN films/high velocity substrates with floated intermediate electrode layers
Kei HukunagaMasashi SuzukiShoji Kakio
Author information
JOURNAL FREE ACCESS

2023 Volume 44 Pages 201-

Details
Article 1st page
Content from these authors
© © 2023 Institute for Ultrasonic Elecronics
Previous article Next article
feedback
Top