Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
2P3-9 3-layer polarization-inverted GeAlN films BAW resonator fabricated by controlling Ar/N2 gas ratio
Aoi Yamamoto, Masashi Suzuki, Shoji Kakio
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2025 Volume 46 Pages 114-

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